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�� ̖		CMS-554C	CMS-665C	CMS-886C	CMS-10108C	CMS-152010C
		CMS-574C	CMS-685C	CMS-8106C	CMS-10128C
		CMS-584C	CMS-6105C	CMS-8126C	CMS-10158C
�г�(mm)	X	500	600	800	1000	1500
	Y	500 / 700 / 800	600 / 800 / 1000	800 / 1000 / 1200	1000 / 1200 / 1500	2000
	Y	400	500	600	800	1000
��g��		MPEE��(3.0��L / 300)um			MPEE��(3.5��L / 200)um
��g��		�ֱ��0.5um �Y��ʽ��ƄӘ�ʽ ��ʣ�500W��X��
��γߴ�(m)		1.21×1.3/1.5/1.6×2.33	1.31×1.4/1.6/1.8×2.53	1.65×1.9/2.1/2.3×2.85	1.85×2.1/2.3/2.6×3.25	3.2×3.3×3.9
��C��(kg)		980/1120/1200	1100/1250/1400	2200/2460/2720	2600/2880/3300	9000
��(kg)		500	800	1000	1500	3000
��b��γߴ�(m)		1.3×1.6/1.8/1.9×2.22	1.4×1.7/1.9/2.1×2.42	1.9×2.3/2.5/2.7×2.4	2.4×2.45/2.65/2.95×2.4	2.5×2.6×1.0

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